The influence of tungsten on thermal stability and mechanical behavior of electrodeposited nickel MEMS structures

Received 29 October 2009; received in revised form 1 July 2010; accepted 4 July 2010. published online 15 July 2010.
Accepted Manuscript

Abstract

Thermal stability and mechanical behavior of LIGA Ni-W alloys with 5 and 15 at.% W were investigated. The strength of these alloys exceeds that for pure LIGA Ni, and the underlying microstructures of the Ni-W alloys are stable to 700°C. The Ni-W alloys are brittle as-deposited, but annealed samples exhibited a promising balance of strength and ductility. Tungsten alloyed LIGA Ni offers increased thermal stability and strength, as well as opportunities for tailoring mechanical properties with heat treatment.

Keywords: Mechanical Properties, nanocrystalline materials, tension test, Ni-W alloys

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a Johns Hopkins University, Department of Mechanical Engineering, Baltimore, Maryland21218, USA

b Karlsruhe Institute of Technology, Institute for Materials Research II, Hermann-von-Helmholtz-Platz 1, D-76344Karlsruhe, Germany

c Karlsruhe Institute of Technology, Institute for Microstructure Technology, Hermann-von-Helmholtz-Platz 1, D-76344Karlsruhe, Germany

Corresponding author.

PII: S1359-6462(10)00467-7

doi:10.1016/j.scriptamat.2010.07.015